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Atomic Layer Processing

Autor
Thorsten Lill

Atomic Layer Processing

Untertitel
Semiconductor Dry Etching Technology
Beschreibung

This practical guide, written by an author actively involved in corporate R&D, provides in-depth information on etching technologies that are used in the semiconductor industry, helping engineers to select the right technologies for their task and to design etching processes.

Verlag
Wiley-VCH
ISBN/EAN
978-3-527-82418-2
Preis
120,99 EUR
Status
lieferbar