Hybrid systems based on inorganic substrates and organic molecules, to create new functional interfaces is of interest for e.g. applications in electronics, optoelectronics and for biosensors. In this work, focus was set on forming stable self-assembled organophosphonate monolayers on a variety of substrates. The covalent grafting of the different monolayers to the surfaces and their potential as a molecular photoresist or as a linker to attach nanoparticles is investigated, as well as the immobilization of photoactive proteins onto graphene substrates.